Reshmi Maity, Santanu Maity, Niladri Pratap Maity, "Modeling and Analysis of Rectangular Structure based Micromachined Ultrasonic Sensor," WSEAS Transactions on Circuits and Systems, vol. 18, pp. 32-38, 2019, DOI:
Reshmi Maity, Santanu Maity, Niladri Pratap Maity. Modeling and Analysis of Rectangular Structure based Micromachined Ultrasonic Sensor.
WSEAS Transactions on Circuits and Systems. 2019;18:32-38.
WSEAS Transactions on Circuits and Systems
Print ISSN: 1109-2734, E-ISSN: 2224-266X
Volume 18, 2019
Modeling and Analysis of Rectangular Structure based Micromachined Ultrasonic Sensor
Authors: , ,
Abstract: In this paper a rectangular silicon nitride membrane capacitive micromachined ultrasonic transducer (CMUT) has been proposed to suit best for medical imaging applications. Investigations have been brought up using single cell rectangular architecture as well as array of the cells through three dimensional finite element method (FEM) model. The maximum and minimum displacements result with single cell and array of cells have been measured. The force is evaluated as 16.894 µN. The relative investigation of membrane displacements of array rectangular geometries on a lone substrate accumulated with dissimilar distances (1 μm, 2 μm, 5 μm, and 8 μm) between each other is also carried out.
Pages: 32-38 WSEAS Transactions on Circuits and Systems, ISSN / E-ISSN: 1109-2734 / 2224-266X, Volume 18, 2019, Art. #6 DOI: *As the DOI is a unique identifier, it is already available in the pdf version.
**The DOI link will be activated in the first midst of January 2026.
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