International Journal of Chemical Engineering and Materials
E-ISSN: 2945-0519
Volume 3, 2024
Silicon Carbide Films as Protective and Optical Coatings
Author:
Abstract: The paper presents the results of experimental studies of amorphous silicon carbide films as a material for applying protective coatings, as well as for creating a submicron structure on the surface of optical elements by the method of cutting the film with laser radiation. The technology for obtaining amorphous SiC films is described. The degradation time of the film cutting of the TbFe film with the cutting protective coatings was measured and it was shown that amorphous SiC films provide more effective protection of TbFe films from oxidation compared to $$SiO_{2}$$ films.