International Journal of Applied Mathematics, Computational Science and Systems Engineering
E-ISSN: 2766-9823
Volume 3, 2021
A Novel Switched-Turn Continuously-Tunable Liquid RF MEMS Solenoid Inductor
Authors: , , , , ,
Abstract: this paper presents a continuously-variable MEMS solenoid inductor operating up to 20 GHz. In this novel idea, a channel is provided to bypass the turns by injection of a conductive liquid (Galinstan). Corresponding to the level of injection, the reduction in number of the turns varies the inductance value. The proposed Solenoid inductor is simulated with HFSS in Silicon substrate with Copper-type coil and injected conductive liquid. The EM simulation results show a maximum quality factor of 20 at 14 GHz and a tuning ratio of 1:5 at 16 GHz frequency. The minimum and maximum inductance values are 0.63 and 3.16 nH at 16 GHz which demonstrates a tuning range equal with 400%.
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Keywords: RF MEMS, tunable inductor, liquid inductor, solenoid, quality factor, tuning range, inductance, liquid-based
Pages: 89-93
International Journal of Applied Mathematics, Computational Science and Systems Engineering, E-ISSN: 2766-9823, Volume 3, 2021, Art. #16